In Situ X-ray Measurements to Follow the Crystallization of BaTiO3 Thin Films during RF-Magnetron Sputter Deposition

Walter, Peter (Corresponding author); Ilchen, Markus; Roeh, JanTorben; Ohm, Wiebke; Zeuthen, Christian Bonar; Klemradt, Uwe

Basel : MDPI (2021)
Contribution to a book, Journal Article

In: Applied Sciences
Volume: 11
Issue: 19
Page(s)/Article-Nr.: 8970