A compact and low-weight sputtering unit for in situ investigations of thin film growth at synchrotron radiation beamlines

Walter, Peter (Corresponding author); Dippel, A.-C.; Pflaum, K.; Wernecke, J.; van den Hurk, Jan; Blume, J.; Klemradt, Uwe

S.l.] : American Institute of Physics (2015)

In: Review of scientific instruments
Band: 86
Heft: 5
Seite(n)/Artikel-Nr.: 053906