A compact and low-weight sputtering unit for in situ investigations of thin film growth at synchrotron radiation beamlines

Walter, Peter (Corresponding author); Dippel, A.-C.; Pflaum, K.; Wernecke, J.; van den Hurk, Jan; Blume, J.; Klemradt, Uwe

S.l.] : American Institute of Physics (2015)
Journal Article

In: Review of scientific instruments
Volume: 86
Issue: 5
Page(s)/Article-Nr.: 053906