Mask aligner for ultrahigh vacuum with capacitive distance control

Bhaskar, Priyamvada (Corresponding author); Mathioudakis, Simon; Olschewski, Tim; Muckel, Florian; Bindel, Jan Raphael; Pratzer, Marco; Liebmann, Marcus; Morgenstern, Markus

Melville, NY : American Inst. of Physics (2018)
Fachzeitschriftenartikel

In: Applied physics letters
Band: 112
Heft: 16
Seite(n)/Artikel-Nr.: 161602