Mask aligner for ultrahigh vacuum with capacitive distance control

Bhaskar, Priyamvada (Corresponding author); Mathioudakis, Simon; Olschewski, Tim; Muckel, Florian; Bindel, Jan Raphael; Pratzer, Marco; Liebmann, Marcus; Morgenstern, Markus

Melville, NY : American Inst. of Physics (2018)
Journal Article

In: Applied physics letters
Volume: 112
Issue: 16
Page(s)/Article-Nr.: 161602